Electron Microprobe Lab

Green Earth Sciences Bldg. Rm 012
Phone: (650) 725-1677

Introduction

The Electron Microprobe Lab is located in LAM's Chemical Characterization Facilities and is funded by the Geological and Environmental Sciences Department. Please contact Robert E. Jones if you would like more information about this facility.

The Instrument

Overview
The JEOL JXA-733A Superprobe is fitted with 5 wavelength-dispersive spectrometers and a Be-window SiLi energy dispersive detector. The instrument is fully automated by Advanced Microbeam hardware (72714.265@compuserve.com) and PROBE-PRBSE microanalysis and digital imaging software. Our lab has more than 100 standard reference materials for quantitative bulk or thin film analysis. Quantitative analysis of bulk specimens is performed using the CITZAF matrix correction algorithms incorporated into the PROBE software. Thin film analysis is performed using STRATA (samx@msn.com).

Detection Limits and Spatial Resolution
The instrument is capable of analyzing the light elements B-C-N-O-F with a detection limit/sensitivity of about 300-1000 ppm and the heavier elements Na up to U with a detection limit/sensitivity of about 30-300 ppm (depending on the mean atomic number of the matrix and x-ray counting times).

The spatial resolution for quantitative analysis is of the order of 1-3 microns. The spatial resolution for secondary and backscattered electron imaging depends on the accelerating voltage and beam current and is approximately 500 nanometers.

Digital Imaging
Digital imaging of secondary electrons, backscattered electrons and characteristic x-rays is performed using PRBSE and Micro-Image software.

Related Sites on the WWW

Microbeam Research Facilities

Other

U. Mass. Probe Image of the Week
Microbeam Analysis Society (MAS)
Microscopes and Microscopy
The Microscopy Usenet Newsgroup Sci.techniques.microscopy


	Last modified Tuesday, 07-Dec-2004 14:55:53 PST Please contact the GES webmaster with suggestions or comments.